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Microtechnology/Overviews
Reference material by Wikibooks contributors. This retains its source identity and is not 411 news reporting.
Overviews
Internet Resources
This wikibook links extensively to wikipedia, but also to many valuable external resources.
See also
Integrated circuit
Microelectronics
Sensors
Actuators
Transducers
Microfluidics
Books
Books about microfabrication
"Fundamentals of Microfabrication" (2nd ed, 2002) by M. Madou - highly recommended!
"Introduction to Microfabrication" (2004) by S. Franssila
Journals
Overview of the microtechnology related journals and their impact factors (Aug. 2006 values)
+Microtechnology Journals Journal link Impact Factor Comments American Journal of Physics (AJP)0.82 ?IEEE Transactions of Electron Devices ?IEEEElectronics Letters1.0?Journal of Applied Physics2.5?Journal of Materials Processing Technology0.6?Journal of Microelectromechanical Systems (J.MEMS)3?Journal Of Microlithography Microfabrication And Microsystems1.4? Journal of Micromechanics and Microengineering 2.5 ?Journal of Microsystem Technologies0.72microsystem technologies-micro-and nanosystems-information storage and processing systems Journal of Solid-state electronics 1.2 ? Journal of Vacuum Science and Technology A (JVSTA)1.4 Vacuum, Surfaces, Films Journal of Vacuum Science and Technology B (JVSTB)1.6 Microelectronics and Nanometer Structures: Processing, Measurement, and PhenomenaLab on a Chip5.3?Microelectronic Engineering1.4?Microelectronics Journal0.35?Sensor Letters1.1?Sensors and Actuators A: Physical1.4?Sensors and Actuators B: Chemical2.6?Surface and Coatings Technology1.6?
Software
Layout Editor
L-Edit
LinkCAD
CleWin
MEMS Simulation
Coventor
Intellisuite
Optical Simulations
Olympios
Microfabrication Products & Companies
Where to buy raw materials, wafers etc, and where to get the fabrication done is you cannot readily access cleanroom facilities.
Foundry services
Danchip- cleanroom access for both industry and universities
Freescale
Honeywell MEMS Foundry Services
X-fab
Micrel's Wafer Fab Division
ISSYS
Micralyne MEMS Foundry
Suppliers of materials for microfabrication
Wafers
Silicon on insulator (SOI) wafers
Icemostech ; UK; [sales@Icemostech.com]; Device layer +/- 0.5 µm
University wafers ; USA; Chris Baker [@universitywafer.com]; All kinds of wafers, possibility of small quantities
Soitec ; France; Sabrina Grosdidier [sabrina.grosdidier@soitec.fr]; High quality SOI, device layer +/- 5 nm
MEMC USA Marco Maffe [mmaffe@memc.it]; Device layer +/- 0.5 µm
Ultrasil ; USA; Thomas J. Gentemann [ultrasiltg@aol.com]; Device layer +/- 0,5 µm, next day shipment of wafers from online inventory
Okmetic Oyj ; Finland; Veli-Pekka Virtanen [veli-pekka.virtanen@okmetic.com]; Device layer +/- 0.5 µm
IBIS ; USA; High quality SOI; Device layer +/- 5 nm
Microtechnology Products
Intel
A Microtechnology Timeline
The first transistor
The first microchip
The first microprocessor
1965 Moores Law
The roadmap
The first PCR lab-on-a-chip system
The first point-of-care lab on a chip system
References
See also notes on editing this book about how to add references Microtechnology/About#How to Contribute.