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1 μm process
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Semiconductor manufacturing process
March 2022
September 2015
The 1 μm process (1 micrometer process) is a level of MOSFET semiconductor process technology that was commercialized around the 1984–1986 timeframe,Mueller S Microprocessors from 1971 to the Present informIT 2006-07-21 http://www.informit.com/articles/article.aspx?p=482324&seqNum=2 2012-05-11 https://web.archive.org/web/20150419173143/http://www.informit.com/articles/article.aspx?p=482324&seqNum=2 2015-04-19 live Myslewski R Happy 40th birthday, Intel 4004! TheRegister 2011-11-15 https://www.theregister.co.uk/Print/2011/11/15/the_first_forty_years_of_intel_microprocessors/ 2015-04-19 https://web.archive.org/web/20150419173435/http://www.theregister.co.uk/Print/2011/11/15/the_first_forty_years_of_intel_microprocessors/ 2015-04-19 live by companies like NTT, NEC, Intel and IBM. It was the first process where CMOS was common (as opposed to NMOS).
The 1 μm process refers to the minimum size that could be reliably produced. The smallest transistors and other circuit elements on a chip made with this process were around 1 micrometer wide.
The earliest MOSFET with a 1μm NMOS channel length was fabricated by a research team led by Robert H. Dennard, Hwa-Nien Yu and F.H. Gaensslen at the IBM T.J. Watson Research Center in 1974.Dennard Robert H. Robert H. Dennard Yu Hwa-Nien Gaensslen F. H. Rideout V. L. Bassous E. LeBlanc A. R. Design of ion-implanted MOSFET's with very small physical dimensions IEEE Journal of Solid-State Circuits October 1974 9 5 256–268 10.1109/JSSC.1974.1050511 1974IJSSC...9..256D 283984 http://www.eng.auburn.edu/~agrawvd/COURSE/READING/LOWP/Design%20of%20ion-implanted%20MOSFETs%20with%20very%20small%20physical%20dimensions.pdf
Products featuring 1.0 μm manufacturing process
NTT introduced the 1μm process for its DRAM memory chips, including its 64kin 1979 and 256kin 1980.Gealow Jeffrey Carl Impact of Processing Technology on DRAM Sense Amplifier Design https://core.ac.uk/download/pdf/4426308.pdf Massachusetts Institute of Technology CORE 10 August 1990 149–166 25 June 2019
NEC's 1Mbit DRAM memory chip was manufactured with the 1μm process in 1984.http://maltiel-consulting.com/Semiconductor_technology_memory.html Memory STOL (Semiconductor Technology Online) 25 June 2019 2 November 2023 https://web.archive.org/web/20231102131915/http://maltiel-consulting.com/Semiconductor_technology_memory.html dead
Intel 80386 CPU launched in 1985 was manufactured using this process.
Intel uses this process on the CHMOS III-E technology.Intel Corporation, "New Product Focus: Components: Two-and Four-Megabit EPROMs are High-Density Performers", Microcomputer Solutions, September/October 1989, page 14
Intel uses this process on the CHMOS IV technology.Intel Corporation, "New Product Focus: Components: New ASSP Suits Mobile Applications", Microcomputer Solutions, September/October 1990, page 11
References
External links
Brief timeline of microprocessor development
1.5 μm process MOSFET semiconductor device fabrication process 800 nm process
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